The Frame program converts HDP files to Frame Format. It accepts multiple HDP and Frame Format files as input and produces a single Frame Format stream. This stream may be routed in realtime to lithography equipment to write or inspect a pattern. The output stream may be routed to a disk file or viewed as it is generated in a rasterization window. The outputs are not mutually exclusive any and all combinations are permitted.
The Frame program can perform realtime pattern file combination. Any number of patterns can be combined. A typical application would be to combine a frame pattern with a device pattern.
Individual HDP input patterns can be scaled and placed at arbitrary X, Y offsets, and stepped in both X and Y. There are additional options for controlling tone, compression, and keeping input files separate in the output Frame File.
Individual FF input pattern files can be placed at offsets that are multiple of the frame dimensions. They can also be tone reversed.
The primary intent of the Frame program is to drive lithography equipment, however, it can also be used just for fracturing a set of HDP patterns. When used for fracturing, the output is a Frame Format file. Because there are no realtime response issues when fracturing, computationally intensive options such as figure overlap removal, software reverse tone, and software pattern compression options can be used.
The Frame program can also be used as a diagnostic tool. All or part of a pattern can be rasterized and viewed. It is also possible to perform arbitrary boolean operations on patterns such as AND, OR, XOR, NOT, etc.. These operations can all be performed with appropriate combinations of input and output tone reversal and the OR (merge) function. Some operations may require feeding an output file back through the system a second time.
| File Name | HDP input file |
| Layer | Layer to process either as a number of symbolic name |
| Primary | Whether this file is the primary input file or not. There can be only one primary input file. Global structure definitions and references can come only from the primary file. |
| Scale | Scale factor for this file (default is 1.0). |
| X Offset | X Offset of pattern in microns |
| Y Offset | X Offset of pattern in microns |
| NX | Number of X instances (default is 1) |
| NY | Number of Y instances (default is 1) |
| DX | X stepping distance in microns |
| DY | Y stepping distance in microns |
| Tone & Compression |
Operations to be performed on this pattern BEFORE merging with other patterns.
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| Automatic/Custom | Specify automatic to have the system calculate the smallest enclosing window. |
| X Low | For custom window, lower left hand X coordinate of output window in microns. |
| Y Low | For custom window, lower left hand Ycoordinate of output window in microns. |
| X High | For custom window, upper right hand X coordinate of output window in microns. |
| Y High | For custom window, upper right hand Ycoordinate of output window in microns. |
| Machine File | Frame Machine File containing description of hardware configuration for target lithography or inspection machine. |
| Grid Size | If machine has variable grid size, grid spacing in microns. |
| Y Grid Size | If machine has variable grid size, and y spacing can differ from x, the y grid spacing in nanometers. |
| Unidirectional Scan | If machine supports both bidirectional and unidirectional scans set this switch for unidirectional scans |
Per FF File Options:
| File Name | Frame Format input file. |
| Primary | Whether this file is the primary input file or not. There can be only one primary input file. Global structure definitions and references can come only from the primary file. |
| X Offset | X Offset of pattern in microns. |
| Y Offset | X Offset of pattern in microns. |
| RevTone | Select to reverse tone this pattern BEFORE merge |
Output Options:
| Tone And Overlap |
|
| Special Output Compression |
Select:
Note that compression is not available if the keep input files separated option is specified. |
| Disk Output | To produce a final Frame Format output file, select option and specify output file name. Final extension by convention is normally ".ff" |
| Statistical Output |
Select Generate Checksum on Final Output to collect various checksums on final output frame stream. This is useful for regression testing to see that nothing has changed. Select Collect Statistics On Final Output to collect statistics such as figure and array counts in final output frame stream. |
Raster Options:
| Raster Window Type |
Select:
|
| Show Frame Grid | Select to have frame grid overlay output |
| Outline figures | Select to have figures drawn in outline mode |
| Clip outlined figures at include window | If outline mode is specified, select to have figures that extend outside of include window drawn as clipped at include window (only relevant if include and exclude windows are different) |
| Automatically select sample interval | Autoscale image to convenient size |
| Sample interval | If autoscale is not selected, the grid sample interval to use (10 for example takes every 10th pixel in X and Y) |
| Bitmap File Name | If you want a permanent bitmap file, specify the name. The default is "last.bmp" in the image directory. |
| Single Frame Info |
If Window Type is Single Frame then specify the following:
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| Coordinate Window Info |
If Window Type is Coordinate Window then specify the following:
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Dump Options:
| Dump Header | Dump output frame header |
| Dump Globals | Dump output global figure list data. |
| No Frame Dump | Do not dump any output frames |
| Dump All Frames | Dump all output frames |
| Dump Frame Range | Dump specified range of frames |
| First Dump Frame | When "Dump Frame Range" is selected specify the first frame to dump as an integer >= 0. |
| Last Dump Frame | When "Dump Frame Range" is selected specify the first frame to dump as an integer >= "First Dump Frame" |
| -ffxoffset | For single input Frame Format file job, the xoffset of the file in microns. |
| -ffyoffset | For single input Frame Format file job, the yoffset of the file in microns. |
| -ffrevtone | Specify reverse tone for a single input Frame Format file job. |
| -hdpcompressfigplacelists | For single input HDP file job, compress placements in X for figures. |
| -hdpcompressrefplacelists | For single input HDP file job, compress placements in X for references. |
| -hdpcompresssimfigs | For single input HDP file job, consolidate similar figures into single placelist. |
| -hdplayer | For single input HDP file job, the layer to process. |
| -hdpdx | For single input HDP file job, the X stepping distance in microns. |
| -hdpdy | For single input HDP file job, the Ystepping distance in microns. |
| -hdpnx | For single input HDP file job, the number of instances in X (defaults to 1) |
| -hdpny | For single input HDP file job, the number of instances in Y(defaults to 1) |
| -hdprevtone | For single input HDP file job, specify reverse tone for pattern. |
| -hdpscale | For single input HDP file job the scale to apply to the pattern. |
| -hdpxoffset | For single input HDP file job the x offset of the pattern in microns. |
| -hdpyoffset | For single input HDP file job the y offset of the pattern in microns. |
| -in | Input file, either HDP, FF, or Pattern Set file |
| -isff | Input file is Frame Format |
| -ishdp | Input file is HDP |
| -isps | Input file is Pattern Set. Pattern set file format is beyond the scope of this document. |
| -machine | Frame Machine File containing description of hardware configuration for target lithography or inspection machine. |
| -outcompressfigplacelists | Compress output placelist is X. |
| -outcompresssimfigs | Consolidate similar figures into single placelist in final output. |
| -outdumpfirstframe | First output frame to dump (defaults to 0 if -outdumplastframe is specified) |
| -outdumpheader | Dump output header of frame stream |
| -outdumpglobals | Dump global struct section in output frame stream |
| -outdumplastframe | Last output frame to dump (defaults to 0 if -outdumpfirstframe is specified) |
| -outff | Output frame format file. Specify the name. |
| -outkeepseparate | Keep input pattern file separate in output. |
| -outnill | No output (test run). |
| -outnooverlap | Generate output without overlapping figures |
| -outrevtone | Generate reverse tone output. |
| -outxhi | If custom output window, upper right hand corner X in microns. |
| -outxlow | If custom output window, lower left hand corner X in microns. |
| -outyhi | If custom output window, upper right hand corner Yin microns. |
| -outylo | If custom output window, lower left hand corner Y in microns. |
| -outgridsize | If machine has variable grid size, the grid size in nanometers. |
| -outygridsize | If machine has variable grid size, and the y grid size can differ from the x grid size, the y grid size in nanometers. |
| -outuni | Produce unidirectional output (scan in one direction) |
| -ras | Rasterization output. Required if any -rasXXX option is used. |
| -rascoordwindow | Rasterization window is coordinate window |
| -rasframegrid | Overlay a frame grid on pattern. |
| -rasinterval | The grid sample interval to use (10 for example takes every 10th pixel in X and Y), default is autoscale |
| -rasname | Output name for permanent bitmap raster file. |
| -rassingleframe | Rasterization window is single frame |
| -rasoutline | Specify to have figures drawn in outline mode |
| -rasoutlineclip | If outline mode is specified, specify to have figures that extend outside of include window drawn as clipped at include window (only relevant if include and exclude windows are different) |
| -rasxframe | If -rassingleframe is specified, the X frame number (offset in frame units, not grid units) of frame to rasterize. This number is an integer >=0 |
| -rasxhi | If -rascoordinate window is specified, upper right hand corner X in microns of region to rasterize. |
| -rasxlow | If -rascoordinate window is specified, lower left hand corner X in microns of region to rasterize. |
| -rasysuperframe | If -rassingleframe is specified, Y super frame number (offset in super frame units, not grid units) of frame to rasterize. This number is an integer >=0. |
| -rasoffsetintosuperframe | If -rassingleframe is specified, Y offset of frame within super frame. If the target machine has multiple frames per superframe specify the frame offset within the super frame. This number is an integer >=0. |
| -rastoexcludewindow | If include window and exclude window are different draw figures out to exclude window. |
| -rasyhi | If -rascoordinate window is specified, upper right hand corner Y in microns of region to rasterize. |
| -rasylow | If -rascoordinate window is specified, lower left hand corner Yin microns of region to rasterize. |
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